"$adddiffusivedope" 修訂間的差異

出自 DDCC TCAD TOOL Manual
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$adddiffusivedope
 
$adddiffusivedope
 
N_region
 
N_region
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>\alpha_x</math> <math>\alpha_y</math>
+
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L__y</math>
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>\alpha_x</math> <math>\alpha_y</math>
+
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L_y</math>
 
...
 
...
 
...
 
...
 
Nth_type ....
 
Nth_type ....
   
type: Can be 1, 11, 111, 2, 12, 112. Please see below
+
type: Can be 1, 11, 111, 101. Please see below
 
regionID: The region No to use the diffusive doping
 
regionID: The region No to use the diffusive doping
 
Ndope: Na pr Nd Posive is for n-type, negative is for p-type
 
Ndope: Na pr Nd Posive is for n-type, negative is for p-type
 
<math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math>
 
<math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math>
   
For type = 1
+
For type = 1, inside regionID
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
x < x_left : <math> N_{d,a} = Ndope * exp(-\alpha_{x}(|x-x_{left}|)) </math>
+
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
x > x_right : <math> N_{d,a} = Ndope * exp(-\alpha_{x}(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
y < y_bottom : <math> N_{d,a} = Ndope * exp(-\alpha_{y}(|y-y_{bottom}|)) </math>
+
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
y > y_top : <math> N_{d,a} = Ndope * exp(-\alpha_{y}(|y-y_{top}|)) </math>
+
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  +
For type = 11, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  +
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
  +
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  +
  +
  +
For type = 101, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  +
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
  +
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  +
For type = 111, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  +
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
  +
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
  +
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>

於 2023年4月25日 (二) 23:23 的修訂

$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x 解析失敗 (語法錯誤): L__y
  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
...
...
Nth_type ....  
type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
alphax and alphay is the diffusion length in x and y direction. The unit is \mu m 
For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 


For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|))