"$adddiffusivedope" 修訂間的差異
出自 DDCC TCAD TOOL Manual
行 3: | 行 3: | ||
$adddiffusivedope |
$adddiffusivedope |
||
N_region |
N_region |
||
− | type regionID Ndope activation_energy x_left y_bottom x_right y_top <math> |
+ | type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L__y</math> |
− | type regionID Ndope activation_energy x_left y_bottom x_right y_top <math> |
+ | type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L_y</math> |
... |
... |
||
... |
... |
||
Nth_type .... |
Nth_type .... |
||
− | type: Can be 1, 11, 111, |
+ | type: Can be 1, 11, 111, 101. Please see below |
regionID: The region No to use the diffusive doping |
regionID: The region No to use the diffusive doping |
||
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
||
<math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math> |
<math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math> |
||
− | For type = 1 |
+ | For type = 1, inside regionID |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
− | x < x_left : <math> N_{d,a} = Ndope * exp(- |
+ | x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
− | x > x_right : <math> N_{d,a} = Ndope * exp(- |
+ | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
− | y < y_bottom : <math> N_{d,a} = Ndope * exp(- |
+ | y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
− | y > y_top : <math> N_{d,a} = Ndope * exp(- |
+ | y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
+ | For type = 11, inside regionID |
||
+ | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
+ | x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
+ | y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
+ | |||
+ | |||
+ | For type = 101, inside regionID |
||
+ | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
+ | x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
+ | y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
+ | For type = 111, inside regionID |
||
+ | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
+ | x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
+ | y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
+ | y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
於 2023年4月25日 (二) 23:23 的修訂
$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
$adddiffusivedope N_region type regionID Ndope activation_energy x_left y_bottom x_right y_top 解析失敗 (語法錯誤): L__y type regionID Ndope activation_energy x_left y_bottom x_right y_top ... ... Nth_type ....
type: Can be 1, 11, 111, 101. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the diffusion length in x and y direction. The unit is
For type = 1, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 11, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
For type = 101, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 111, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :