"$adddiffusivedope" 修訂間的差異

出自 DDCC TCAD TOOL Manual
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$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
+
$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
   
 
$adddiffusivedope
  
$adddiffusivedope
行 17： 行 17：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
行 23： 行 23：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
   
−
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
 +
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
   
 
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
 
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
行 34： 行 34：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
行 40： 行 40：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
行 54： 行 54：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
−
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
+
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
行 60： 行 60：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
−
x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
+
x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
   
−
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
 +
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
   
 
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
 
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
行 71： 行 71：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
−
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
+
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
行 77： 行 77：
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
−
x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
+
x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
 
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>

於 2024年4月28日 (日) 11:53 的修訂

$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is 

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
...
...
Nth_type ....  

type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
L_{x} and L_{y} is the diffusion length in x and y direction. The unit is \mu m 

For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 

As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. 

For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 



type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
L_{x} and L_{y} is the Gaussian broading width in x and y direction. The unit is \mu m 

For type = 2, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 
For type = 12, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 

As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. 

For type = 102, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 
For type = 112, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2})
取自 "http://yrwu-wk.ee.ntu.edu.tw/mediawiki/index.php?title=$adddiffusivedope&oldid=2830"