"$adddiffusivedope" 修訂間的差異

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$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
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$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
   
 
$adddiffusivedope
  
$adddiffusivedope
 
N_region
  
N_region
−
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L__y</math>
+
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L_y</math>
 
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L_y</math>
 
type regionID Ndope activation_energy x_left y_bottom x_right y_top <math>L_x</math> <math>L_y</math>
 
...
  
...
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regionID: The region No to use the diffusive doping
  
regionID: The region No to use the diffusive doping
 
Ndope: Na pr Nd Posive is for n-type, negative is for p-type
  
Ndope: Na pr Nd Posive is for n-type, negative is for p-type
−
<math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math>
 +
<math>L_{x}</math> and <math>L_{y}</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math>
   
 
For type = 1, inside regionID
  
For type = 1, inside regionID
 
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
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x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  +
  +
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
   
 
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
 
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
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x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
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x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
 
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
−
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math>
+
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>
 
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
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  +
  +
  +
type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below
  +
regionID: The region No to use the diffusive doping
  +
Ndope: Na pr Nd Posive is for n-type, negative is for p-type
  +
<math>L_{x}</math> and <math>L_{y}</math> is the Gaussian broading width in x and y direction. The unit is <math>\mu m </math>
  +
  +
For type = 2, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  +
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
  +
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
  +
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
  +
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  +
For type = 12, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math>
  +
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
  +
x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
  +
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
  +
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  +
  +
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
  +
  +
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
  +
  +
For type = 102, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  +
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
  +
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
  +
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
  +
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  +
For type = 112, inside regionID
  +
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math>
  +
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math>
  +
x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math>
  +
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>
  +
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  +
  +
<br>'''<big><big>The $adddiffusivedope setting in GUI interface is here</big></big>''' <br>
  +
Press '''Additional Function''', check the box for '''Functional Dope''' and fill in these fields as needed!<br>
  +
[[檔案:2D_adddiffusivedope_fig1.jpg|1200px]]

於 2024年11月20日 (三) 20:17 的最新修訂

$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is 

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
...
...
Nth_type ....  

type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
L_{x} and L_{y} is the diffusion length in x and y direction. The unit is \mu m 

For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 

As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. 

For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|))  
y < y_bottom  :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 



type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
L_{x} and L_{y} is the Gaussian broading width in x and y direction. The unit is \mu m 

For type = 2, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 
For type = 12, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 

As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. 

For type = 102, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) 
For type = 112, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{impurity} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2})  
x > x_right   :   N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2})  
y < y_bottom  :   N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2})  
y > y_top     :   N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2})


The $adddiffusivedope setting in GUI interface is here
Press Additional Function, check the box for Functional Dope and fill in these fields as needed!
2D adddiffusivedope fig1.jpg

取自 "http://yrwu-wk.ee.ntu.edu.tw/mediawiki/index.php?title=$adddiffusivedope&oldid=4302"