"$adddiffusivedope" 修訂間的差異
出自 DDCC TCAD TOOL Manual
(未顯示由 1 位使用者於中間所作的 2 次修訂) | |||
行 1: | 行 1: | ||
− | $adddiffusivedope is the command |
+ | $adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is |
$adddiffusivedope |
$adddiffusivedope |
||
行 12: | 行 12: | ||
regionID: The region No to use the diffusive doping |
regionID: The region No to use the diffusive doping |
||
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
||
− | <math> |
+ | <math>L_{x}</math> and <math>L_{y}</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math> |
For type = 1, inside regionID |
For type = 1, inside regionID |
||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
− | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{ |
+ | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> |
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
行 23: | 行 23: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
− | x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{ |
+ | x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> |
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
− | As shown in above equation, the difference between 11 and 1 is that |
+ | As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19 |
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. |
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. |
||
行 34: | 行 34: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
||
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
− | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{ |
+ | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> |
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
行 40: | 行 40: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
||
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> |
||
− | x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{ |
+ | x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> |
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
||
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
||
行 46: | 行 46: | ||
− | type: Can be 2, 12, 112, 102. Please see below |
+ | type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below |
regionID: The region No to use the diffusive doping |
regionID: The region No to use the diffusive doping |
||
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
||
− | <math> |
+ | <math>L_{x}</math> and <math>L_{y}</math> is the Gaussian broading width in x and y direction. The unit is <math>\mu m </math> |
For type = 2, inside regionID |
For type = 2, inside regionID |
||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
||
− | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ |
+ | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> |
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
||
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
||
行 60: | 行 60: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
||
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
||
− | x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ |
+ | x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> |
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
||
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
||
− | As shown in above equation, the difference between 11 and 1 is that |
+ | As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19 |
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. |
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. |
||
行 71: | 行 71: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
||
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
||
− | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ |
+ | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> |
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
||
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
||
行 77: | 行 77: | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
||
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
||
− | x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ |
+ | x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> |
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
||
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
||
+ | |||
+ | <br>'''<big><big>The $adddiffusivedope setting in GUI interface is here</big></big>''' <br> |
||
+ | Press '''Additional Function''', check the box for '''Functional Dope''' and fill in these fields as needed!<br> |
||
+ | [[檔案:2D_adddiffusivedope_fig1.jpg|1200px]] |
於 2024年11月20日 (三) 20:17 的最新修訂
$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
$adddiffusivedope N_region type regionID Ndope activation_energy x_left y_bottom x_right y_top type regionID Ndope activation_energy x_left y_bottom x_right y_top ... ... Nth_type ....
type: Can be 1, 11, 111, 101. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the diffusion length in x and y direction. The unit is
For type = 1, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 11, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 101, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 111, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the Gaussian broading width in x and y direction. The unit is
For type = 2, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 12, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 102, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 112, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
The $adddiffusivedope setting in GUI interface is here
Press Additional Function, check the box for Functional Dope and fill in these fields as needed!