「$adddiffusivedope」:修訂間差異

出自DDCC TCAD TOOL Manual
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  y < y_bottom  : <math>  N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>  
  y < y_bottom  : <math>  N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math>  
  y > y_top    : <math>  N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
  y > y_top    : <math>  N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math>
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19


For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that  N_impuriy is 100% activated.  
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that  N_impuriy is 100% activated.  

於 2023年4月25日 (二) 15:28 的修訂

$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top Lx Ly  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top Lx Ly  
...
...
Nth_type ....  
type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
alphax and alphay is the diffusion length in x and y direction. The unit is μm
For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Nd,a+Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nd,a=Nd,a+Ndope*exp(1/Lx*(|xxleft|)) 
y < y_bottom  : Nd,a=Nd,a+Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nd,a=Nd,a+Ndope*exp(1/Ly*(|yytop|))
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nd,a=Ndope*exp(1/Lx*(|xxleft|)) 
y < y_bottom  : Nd,a=Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nd,a=Ndope*exp(1/Ly*(|yytop|))
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.

For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Nimpurity+Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nimpurity=Nimpurity+Ndope*exp(1/Lx*(|xxleft|)) 
y < y_bottom  : Nimpurity=Nimpurity+Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nimpurity=Nimpurity+Ndope*exp(1/Ly*(|yytop|))
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nimpurity=Ndope*exp(1/Lx*(|xxleft|)) 
y < y_bottom  : Nimpurity=Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nimpurity=Ndope*exp(1/Ly*(|yytop|))