"$adddiffusivedope" 修訂間的差異
出自 DDCC TCAD TOOL Manual
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y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> |
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y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> |
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| + | type: Can be 2, 12, 112, 102. Please see below |
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| + | regionID: The region No to use the diffusive doping |
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| + | Ndope: Na pr Nd Posive is for n-type, negative is for p-type |
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| + | <math>alphax</math> and <math>alphay</math> is the diffusion length in x and y direction. The unit is <math>\mu m </math> |
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| + | For type = 2, inside regionID |
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| + | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
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| + | x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
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| + | y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
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| + | For type = 12, inside regionID |
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| + | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> |
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| + | x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
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| + | y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
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| + | As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19 |
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| + | For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. |
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| + | For type = 102, inside regionID |
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| + | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
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| + | x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
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| + | y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
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| + | For type = 112, inside regionID |
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| + | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> |
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| + | x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> |
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| + | y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> |
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| + | y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> |
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於 2024年4月28日 (日) 11:46 的修訂
$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
$adddiffusivedope N_region type regionID Ndope activation_energy x_left y_bottom x_right y_top
type regionID Ndope activation_energy x_left y_bottom x_right y_top
type: Can be 1, 11, 111, 101. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-typeand
is the diffusion length in x and y direction. The unit is
For type = 1, inside regionID x_left < x < x_right y_bottom < y < y_top :x < x_left :
x > x_right :
y > y_top :
For type = 11, inside regionID x_left < x < x_right y_bottom < y < y_top :
x > x_right :
y > y_top :
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 101, inside regionID x_left < x < x_right y_bottom < y < y_top :x < x_left :
x > x_right :
y > y_top :
For type = 111, inside regionID x_left < x < x_right y_bottom < y < y_top :
x > x_right :
y > y_top :
type: Can be 2, 12, 112, 102. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type
For type = 2, inside regionID x_left < x < x_right y_bottom < y < y_top :x > x_right :
y > y_top :
For type = 12, inside regionID x_left < x < x_right y_bottom < y < y_top :
x > x_right :
y > y_top :
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 102, inside regionID x_left < x < x_right y_bottom < y < y_top :x > x_right :
y > y_top :
For type = 112, inside regionID x_left < x < x_right y_bottom < y < y_top :
x > x_right :
y > y_top :
