「$adddiffusivedope」：修訂間差異
跳至導覽
跳至搜尋
無編輯摘要 |
無編輯摘要 |
||
| 第1行： | 第1行： | ||
$adddiffusivedope is the command | $adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is | ||
$adddiffusivedope | $adddiffusivedope | ||
| 第17行： | 第17行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | ||
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | ||
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{ | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> | ||
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | ||
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | ||
| 第23行： | 第23行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | ||
x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | x < x_left : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | ||
x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{ | x > x_right : <math> N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> | ||
y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | y < y_bottom : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | ||
y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | y > y_top : <math> N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | ||
As shown in above equation, the difference between 11 and 1 is that | As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19 | ||
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. | For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. | ||
| 第34行： | 第34行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | ||
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | ||
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{ | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> | ||
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | ||
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | ||
| 第40行： | 第40行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | ||
x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | x < x_left : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|)) </math> | ||
x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{ | x > x_right : <math> N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{right}|)) </math> | ||
y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | y < y_bottom : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|)) </math> | ||
y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | y > y_top : <math> N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) </math> | ||
| 第54行： | 第54行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | ||
x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | x < x_left : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | ||
x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ | x > x_right : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> | ||
y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | y < y_bottom : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | ||
y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | y > y_top : <math> N_{d,a} = N_{d,a}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | ||
| 第60行： | 第60行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{d,a} = Ndope </math> | ||
x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | x < x_left : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | ||
x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ | x > x_right : <math> N_{d,a} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> | ||
y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | y < y_bottom : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | ||
y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | y > y_top : <math> N_{d,a} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | ||
As shown in above equation, the difference between 11 and 1 is that | As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19 | ||
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. | For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated. | ||
| 第71行： | 第71行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | ||
x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | x < x_left : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | ||
x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ | x > x_right : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> | ||
y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | y < y_bottom : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | ||
y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | y > y_top : <math> N_{impurity} = N_{impurity}+ Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | ||
| 第77行： | 第77行： | ||
x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | x_left < x < x_right y_bottom < y < y_top : <math> N_{impurity} = Ndope </math> | ||
x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | x < x_left : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{left}|)^{2}) </math> | ||
x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{ | x > x_right : <math> N_{impurity} = Ndope * exp(-0.5/L_{x}^{2}*(|x-x_{right}|)^{2}) </math> | ||
y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | y < y_bottom : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math> | ||
y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | y > y_top : <math> N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math> | ||
於 2024年4月28日 (日) 03:53 的修訂
$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
$adddiffusivedope N_region type regionID Ndope activation_energy x_left y_bottom x_right y_top type regionID Ndope activation_energy x_left y_bottom x_right y_top ... ... Nth_type ....
type: Can be 1, 11, 111, 101. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the diffusion length in x and y direction. The unit is
For type = 1, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 11, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 101, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 111, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the Gaussian broading width in x and y direction. The unit is
For type = 2, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 12, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 102, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 112, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :