「$adddiffusivedope」:修訂間差異

出自DDCC TCAD TOOL Manual
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  y < y_bottom  : <math>  N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>  
  y < y_bottom  : <math>  N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{bottom}|)^{2}) </math>  
  y > y_top    : <math>  N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
  y > y_top    : <math>  N_{impurity} = Ndope * exp(-0.5/L_{y}^{2}*(|y-y_{top}|)^{2}) </math>
<br>'''<big><big>The $adddiffusivedope setting in GUI interface is here</big></big>''' <br>
Press '''Additional Function''', check the box for '''Functional Dope''' and fill in these fields as needed!<br>
[[檔案:2D_adddiffusivedope_fig1.jpg|1200px]]

於 2024年11月20日 (三) 12:17 的修訂

$adddiffusivedope is the command that puts diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top Lx Ly  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top Lx Ly  
...
...
Nth_type ....  
type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
Lx and Ly is the diffusion length in x and y direction. The unit is μm
For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Nd,a+Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nd,a=Nd,a+Ndope*exp(1/Lx*(|xxright|)) 
y < y_bottom  : Nd,a=Nd,a+Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nd,a=Nd,a+Ndope*exp(1/Ly*(|yytop|))
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nd,a=Ndope*exp(1/Lx*(|xxright|)) 
y < y_bottom  : Nd,a=Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nd,a=Ndope*exp(1/Ly*(|yytop|))
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.

For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Nimpurity+Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nimpurity=Nimpurity+Ndope*exp(1/Lx*(|xxright|)) 
y < y_bottom  : Nimpurity=Nimpurity+Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nimpurity=Nimpurity+Ndope*exp(1/Ly*(|yytop|))
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Ndope*exp(1/Lx*(|xxleft|)) 
x > x_right   : Nimpurity=Ndope*exp(1/Lx*(|xxright|)) 
y < y_bottom  : Nimpurity=Ndope*exp(1/Ly*(|yybottom|)) 
y > y_top     : Nimpurity=Ndope*exp(1/Ly*(|yytop|))


type: Can be 2, 12, 112, 102. with is decay like Gaussian broadening. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
Lx and Ly is the Gaussian broading width in x and y direction. The unit is μm
For type = 2, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Nd,a+Ndope*exp(0.5/Lx2*(|xxleft|)2) 
x > x_right   : Nd,a=Nd,a+Ndope*exp(0.5/Lx2*(|xxright|)2) 
y < y_bottom  : Nd,a=Nd,a+Ndope*exp(0.5/Ly2*(|yybottom|)2) 
y > y_top     : Nd,a=Nd,a+Ndope*exp(0.5/Ly2*(|yytop|)2)
For type = 12, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nd,a=Ndope
x < x_left    : Nd,a=Ndope*exp(0.5/Lx2*(|xxleft|)2) 
x > x_right   : Nd,a=Ndope*exp(0.5/Lx2*(|xxright|)2) 
y < y_bottom  : Nd,a=Ndope*exp(0.5/Ly2*(|yybottom|)2) 
y > y_top     : Nd,a=Ndope*exp(0.5/Ly2*(|yytop|)2)
As shown in the above equation, the difference between 11 and 1 is that the diffusive dopant is additional to the region. For example, in parameters, you already set the doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then, the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19

For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.

For type = 102, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Nimpurity+Ndope*exp(0.5/Lx2*(|xxleft|)2) 
x > x_right   : Nimpurity=Nimpurity+Ndope*exp(0.5/Lx2*(|xxright|)2) 
y < y_bottom  : Nimpurity=Nimpurity+Ndope*exp(0.5/Ly2*(|yybottom|)2) 
y > y_top     : Nimpurity=Nimpurity+Ndope*exp(0.5/Ly2*(|yytop|)2)
For type = 112, inside regionID
x_left < x < x_right  y_bottom < y < y_top :  Nimpurity=Ndope
x < x_left    : Nimpurity=Ndope*exp(0.5/Lx2*(|xxleft|)2) 
x > x_right   : Nimpurity=Ndope*exp(0.5/Lx2*(|xxright|)2) 
y < y_bottom  : Nimpurity=Ndope*exp(0.5/Ly2*(|yybottom|)2) 
y > y_top     : Nimpurity=Ndope*exp(0.5/Ly2*(|yytop|)2)


The $adddiffusivedope setting in GUI interface is here
Press Additional Function, check the box for Functional Dope and fill in these fields as needed!