$adddiffusivedope

出自 DDCC TCAD TOOL Manual
於 2023年4月25日 (二) 23:23 由 Yrwu (對話 | 貢獻) 所做的修訂

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$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is

$adddiffusivedope
N_region
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x 解析失敗 (語法錯誤): L__y
  
type  regionID Ndope  activation_energy  x_left  y_bottom  x_right y_top L_x L_y  
...
...
Nth_type ....  
type: Can be 1, 11, 111, 101. Please see below
regionID:  The region No to use the diffusive doping
Ndope: Na pr Nd  Posive is for n-type, negative is for p-type
alphax and alphay is the diffusion length in x and y direction. The unit is \mu m 
For type = 1, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = N_{d,a}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 11, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{d,a} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{d,a} = Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 


For type = 101, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = N_{impurity}+ Ndope * exp(-1/L_{y}*(|y-y_{top}|)) 
For type = 111, inside regionID
x_left < x < x_right  y_bottom < y < y_top :    N_{d,a} = Ndope 
x < x_left    :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
x > x_right   :   N_{impurity} = Ndope * exp(-1/L_{x}*(|x-x_{left}|))  
y < y_bottom  :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{bottom}|))  
y > y_top     :   N_{impurity} = Ndope * exp(-1/L_{y}*(|y-y_{top}|))