$adddiffusivedope
出自 DDCC TCAD TOOL Manual
$adddiffusivedope is the command to put diffusive dopant distribution in the device. The doping density decay can be either exponential decay or Gaussian distribution. The command is
$adddiffusivedope N_region type regionID Ndope activation_energy x_left y_bottom x_right y_top type regionID Ndope activation_energy x_left y_bottom x_right y_top ... ... Nth_type ....
type: Can be 1, 11, 111, 101. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the diffusion length in x and y direction. The unit is
For type = 1, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 11, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 101 and 111, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 101, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 111, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
type: Can be 2, 12, 112, 102. Please see below regionID: The region No to use the diffusive doping Ndope: Na pr Nd Posive is for n-type, negative is for p-type and is the diffusion length in x and y direction. The unit is
For type = 2, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 12, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :
As shown in above equation, the difference between 11 and 1 is that for, the diffusive dopant is additional to the regionID. For example, in parameters, you already set doping density to be -1.0e19. If you use 1, Ndope = 2.0e19. Then the final doping density in this region is 2e19-1e19 = 1.0e19. If you use 11, the doping density becomes 2e19
For 102 and 112, it is applied in impurity. The difference between N_impuriy and N_{d,a} is that N_impuriy is 100% activated.
For type = 102, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top : For type = 112, inside regionID x_left < x < x_right y_bottom < y < y_top : x < x_left : x > x_right : y < y_bottom : y > y_top :