$deformperiod
出自 DDCC TCAD TOOL Manual
$deformboundary is the definition of N deform reions
$deformperiod type N_period spacing type N_period spacing type N_period spacing type N_period spacing type N_period spacing
type =1 (equal to $deformboundary type 1. No periodicity type =11 periodicity of deform region along the x direction. type =21 periodicity of deform region along the y direction.
Example:
$deformperiod 1 1 0.0 11 20 1.0 21 2 2.0